Publication: IEICE TRANSACTIONS on Electronics Publication Date: 2000/05/25 Vol. E83-CNo. 5 ;
pp. 728-735 Type of Manuscript: Special Section PAPER (Special Issue on Recent Developments in Guided-Wave Problems) Category: Keyword: IC interconnects, VLSI circuits, silicon substrate, s-parameters, proximity effect,
Publication: IEICE TRANSACTIONS on Electronics Publication Date: 1996/02/25 Vol. E79-CNo. 2 ;
pp. 192-197 Type of Manuscript: Special Section PAPER (Special Issue on Microelectronic Test Structures) Category: SOI & Material Characterization Keyword: silicon substrate, crystal defect, TDDB, test structure,
Publication: IEICE TRANSACTIONS on Electronics Publication Date: 1993/04/25 Vol. E76-CNo. 4 ;
pp. 635-640 Type of Manuscript: Special Section PAPER (Special Issue on Sub-Half Micron Si Device and Process Technologies) Category: Process Technology Keyword: metallic impurity, adsorption behavior, silicon substrate, charge transfer reaction, ion complex,