Keyword : silicon substrate


Experimental Characterization and Modeling of Transmission Line Effects for High-Speed VLSI Circuit Interconnects
Woojin JIN Seongtae YOON Yungseon EO Jungsun KIM 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2000/05/25
Vol. E83-C  No. 5 ; pp. 728-735
Type of Manuscript:  Special Section PAPER (Special Issue on Recent Developments in Guided-Wave Problems)
Category: 
Keyword: 
IC interconnectsVLSI circuitssilicon substrates-parametersproximity effect
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Test Structure for the Evaluation of Si Substrates
Yoshiko YOSHIDA Mikihiro KIMURA Morihiko KUME Hidekazu YAMAMOTO Hiroshi KOYAMA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1996/02/25
Vol. E79-C  No. 2 ; pp. 192-197
Type of Manuscript:  Special Section PAPER (Special Issue on Microelectronic Test Structures)
Category: SOI & Material Characterization
Keyword: 
silicon substratecrystal defectTDDBtest structure
 Summary | Full Text:PDF

Copper Adsorption Behavior on Silicon Substrates
Yoshimi SHIRAMIZU Makoto MORITA Akihiko ISHITANI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1993/04/25
Vol. E76-C  No. 4 ; pp. 635-640
Type of Manuscript:  Special Section PAPER (Special Issue on Sub-Half Micron Si Device and Process Technologies)
Category: Process Technology
Keyword: 
metallic impurityadsorption behaviorsilicon substratecharge transfer reactionion complex
 Summary | Full Text:PDF