Keyword : crystal defect

Study of LOCOS-Induced Anomalous Leakage Current in Thin Film SOI MOSFET's
Shigeru KAWANAKA Shinji ONGA Takako OKADA Michihiro OOSE Toshihiko IINUMA Tomoaki SHINO Takashi YAMADA Makoto YOSHIMI Shigeyoshi WATANABE 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1999/07/25
Vol. E82-C  No. 7 ; pp. 1341-1346
Type of Manuscript:  PAPER
Category: Semiconductor Materials and Devices
Keyword: 
SOI, LOCOS isolation, crystal defect, leakage current, stress, 
 Summary | Full Text:PDF
Test Structure for the Evaluation of Si Substrates
Yoshiko YOSHIDA Mikihiro KIMURA Morihiko KUME Hidekazu YAMAMOTO Hiroshi KOYAMA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1996/02/25
Vol. E79-C  No. 2 ; pp. 192-197
Type of Manuscript:  Special Section PAPER (Special Issue on Microelectronic Test Structures)
Category: SOI & Material Characterization
Keyword: 
silicon substrate, crystal defect, TDDB, test structure, 
 Summary | Full Text:PDF