Yoshiko YOSHIDA


Test Structure for the Evaluation of Si Substrates
Yoshiko YOSHIDA Mikihiro KIMURA Morihiko KUME Hidekazu YAMAMOTO Hiroshi KOYAMA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1996/02/25
Vol. E79-C  No. 2  pp. 192-197
Type of Manuscript:  Special Section PAPER (Special Issue on Microelectronic Test Structures)
Category: SOI & Material Characterization
Keyword: 
silicon substratecrystal defectTDDBtest structure
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