Hiroshi KOYAMA


FOREWORD
Hiroshi KOYAMA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1999/04/25
Vol. E82-C  No. 4  pp. 569-569
Type of Manuscript:  FOREWORD
Category: 
Keyword: 
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Test Structure for the Evaluation of Si Substrates
Yoshiko YOSHIDA Mikihiro KIMURA Morihiko KUME Hidekazu YAMAMOTO Hiroshi KOYAMA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1996/02/25
Vol. E79-C  No. 2  pp. 192-197
Type of Manuscript:  Special Section PAPER (Special Issue on Microelectronic Test Structures)
Category: SOI & Material Characterization
Keyword: 
silicon substratecrystal defectTDDBtest structure
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Reliability Evaluation of Thin Gate Oxide Using a Flat Capacitor Test Structure
Masafumi KATSUMATA Jun-ichi MITSUHASHI Kiyoteru KOBAYASHI Yoji MASHIKO Hiroshi KOYAMA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1996/02/25
Vol. E79-C  No. 2  pp. 206-210
Type of Manuscript:  Special Section PAPER (Special Issue on Microelectronic Test Structures)
Category: Reliability Analysis
Keyword: 
test structurevery low-level currentatto amperesmeasurement technique
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