Keyword : metallic impurity


Copper Adsorption Behavior on Silicon Substrates
Yoshimi SHIRAMIZU Makoto MORITA Akihiko ISHITANI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1993/04/25
Vol. E76-C  No. 4 ; pp. 635-640
Type of Manuscript:  Special Section PAPER (Special Issue on Sub-Half Micron Si Device and Process Technologies)
Category: Process Technology
Keyword: 
metallic impurityadsorption behaviorsilicon substratecharge transfer reactionion complex
 Summary | Full Text:PDF

The Segregation and Removal of Metallic Impurities at the Interface of Silicon Wafer Surface and Liquid Chemicals
Takashi IMAOKA Takehiko KEZUKA Jun TAKANO Isamu SUGIYAMA Tadahiro OHMI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1992/07/25
Vol. E75-C  No. 7 ; pp. 816-828
Type of Manuscript:  Special Section PAPER (Special Issue on Ultra Clean Technology)
Category: 
Keyword: 
metallic impuritysegregationwafer cleaning
 Summary | Full Text:PDF