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IEICE Trans

Jun-ichi MITSUHASHI

Reliability Evaluation of Thin Gate Oxide Using a Flat Capacitor Test Structure
Masafumi KATSUMATA Jun-ichi MITSUHASHI Kiyoteru KOBAYASHI Yoji MASHIKO Hiroshi KOYAMA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1996/02/25
Vol. E79-C  No. 2  pp. 206-210
Type of Manuscript:  Special Section PAPER (Special Issue on Microelectronic Test Structures)
Category: Reliability Analysis
Keyword: 
test structure, very low-level current, atto amperes, measurement technique, 
 Summary | Full Text:PDF
Hot Carrier Evaluation of TFT by Emission Microscopy
Junko KOMORI Jun-ichi MITSUHASHI Shigenobu MAEDA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1994/03/25
Vol. E77-C  No. 3  pp. 367-372
Type of Manuscript:  Special Section PAPER (Special Issue on Quarter Micron Si Device and Process Technologies)
Category: Device Technology
Keyword: 
hot carrier, thin film transistor (TFT), emission microscopy, plasma hydrogenation, 
 Summary | Full Text:PDF