Jun-ichi MITSUHASHI


Reliability Evaluation of Thin Gate Oxide Using a Flat Capacitor Test Structure
Masafumi KATSUMATA Jun-ichi MITSUHASHI Kiyoteru KOBAYASHI Yoji MASHIKO Hiroshi KOYAMA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1996/02/25
Vol. E79-C  No. 2  pp. 206-210
Type of Manuscript:  Special Section PAPER (Special Issue on Microelectronic Test Structures)
Category: Reliability Analysis
Keyword: 
test structurevery low-level currentatto amperesmeasurement technique
 Summary | Full Text:PDF

Hot Carrier Evaluation of TFT by Emission Microscopy
Junko KOMORI Jun-ichi MITSUHASHI Shigenobu MAEDA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1994/03/25
Vol. E77-C  No. 3  pp. 367-372
Type of Manuscript:  Special Section PAPER (Special Issue on Quarter Micron Si Device and Process Technologies)
Category: Device Technology
Keyword: 
hot carrierthin film transistor (TFT)emission microscopyplasma hydrogenation
 Summary | Full Text:PDF