Keyword : very low-level current


Reliability Evaluation of Thin Gate Oxide Using a Flat Capacitor Test Structure
Masafumi KATSUMATA Jun-ichi MITSUHASHI Kiyoteru KOBAYASHI Yoji MASHIKO Hiroshi KOYAMA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1996/02/25
Vol. E79-C  No. 2 ; pp. 206-210
Type of Manuscript:  Special Section PAPER (Special Issue on Microelectronic Test Structures)
Category: Reliability Analysis
Keyword: 
test structurevery low-level currentatto amperesmeasurement technique
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