Keyword : thin film transistor (TFT)


Hot Carrier Evaluation of TFT by Emission Microscopy
Junko KOMORI Jun-ichi MITSUHASHI Shigenobu MAEDA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1994/03/25
Vol. E77-C  No. 3 ; pp. 367-372
Type of Manuscript:  Special Section PAPER (Special Issue on Quarter Micron Si Device and Process Technologies)
Category: Device Technology
Keyword: 
hot carrierthin film transistor (TFT)emission microscopyplasma hydrogenation
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