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IEICE Trans

Akira USAMI

Micro-Raman Characterization of a Ge/Si Heterostructure Grown by Chemical Vapor Deposition
Masaya ICHIMURA Yukihisa MORIGUCHI Akira USAMI Takao WADA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1992/09/25
Vol. E75-C  No. 9  pp. 1056-1062
Type of Manuscript:  Special Section PAPER (Special Issue on Silicon Devices and Materials)
Category: 
Keyword: 
Raman spectroscopy, heterostructure, Ge/Si, interdiffusion, lattice-mismatch, 
 Summary | Full Text:PDF
Evaluation of Bonding Silicon-on-Insulator Films with Deep-Level Transient Spectroscopy Measurements
Akira USAMI Taichi NATORI Akira ITO Shun-ichiro ISHIGAMI Yutaka TOKUDA Takao WADA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1992/09/25
Vol. E75-C  No. 9  pp. 1049-1055
Type of Manuscript:  Special Section PAPER (Special Issue on Silicon Devices and Materials)
Category: 
Keyword: 
bonding SOI, DLTS, thermal donor, C-V, void, 
 Summary | Full Text:PDF
Contactless Evaluation Using a Laser/Microwave Method for the Silicon-on-Insulator Made by Wafer Bonding
Akira USAMI Takahisa NAKAI Hideki FUJIWARA Shun-ichiro ISHIGAMI Takao WADA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1992/09/25
Vol. E75-C  No. 9  pp. 1043-1048
Type of Manuscript:  Special Section PAPER (Special Issue on Silicon Devices and Materials)
Category: 
Keyword: 
SOI, wafer bonding, void, laser/microwave method, lifetime, 
 Summary | Full Text:PDF
Characterization of a Silicon Wafer after the Removal of Photoresist Layer Using Two Lasers of Different Wavelengths
Akira USAMI Hideki FUJIWARA Takahisa NAKAI Kazunori MATSUKI Tsutomu TAKEUCHI Takao WADA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1992/09/25
Vol. E75-C  No. 9  pp. 978-985
Type of Manuscript:  Special Section PAPER (Special Issue on Silicon Devices and Materials)
Category: 
Keyword: 
lifetime, SRMI, impedance mismatching, R-SRMI, 
 Summary | Full Text:PDF
Improvement of Contactless Evaluation for Surface Contamination Using Two Lasers of Different Wavelengths to Exclude the Effect of Impedance Mismatching
Akira USAMI Hideki FUJIWARA Noboru YAMADA Kazunori MATSUKI Tsutomu TAKEUCHI Takao WADA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1992/05/25
Vol. E75-C  No. 5  pp. 595-603
Type of Manuscript:  PAPER
Category: Semiconductor Materials and Devices
Keyword: 
lifetime, SRMI, impedance mismatching, R-SRMI, 
 Summary | Full Text:PDF