Kazunori MATSUKI


Characterization of a Silicon Wafer after the Removal of Photoresist Layer Using Two Lasers of Different Wavelengths
Akira USAMI Hideki FUJIWARA Takahisa NAKAI Kazunori MATSUKI Tsutomu TAKEUCHI Takao WADA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1992/09/25
Vol. E75-C  No. 9  pp. 978-985
Type of Manuscript:  Special Section PAPER (Special Issue on Silicon Devices and Materials)
Category: 
Keyword: 
lifetimeSRMIimpedance mismatchingR-SRMI
 Summary | Full Text:PDF

Improvement of Contactless Evaluation for Surface Contamination Using Two Lasers of Different Wavelengths to Exclude the Effect of Impedance Mismatching
Akira USAMI Hideki FUJIWARA Noboru YAMADA Kazunori MATSUKI Tsutomu TAKEUCHI Takao WADA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1992/05/25
Vol. E75-C  No. 5  pp. 595-603
Type of Manuscript:  PAPER
Category: Semiconductor Materials and Devices
Keyword: 
lifetimeSRMIimpedance mismatchingR-SRMI
 Summary | Full Text:PDF