Noboru YAMADA


Improvement of Contactless Evaluation for Surface Contamination Using Two Lasers of Different Wavelengths to Exclude the Effect of Impedance Mismatching
Akira USAMI Hideki FUJIWARA Noboru YAMADA Kazunori MATSUKI Tsutomu TAKEUCHI Takao WADA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1992/05/25
Vol. E75-C  No. 5  pp. 595-603
Type of Manuscript:  PAPER
Category: Semiconductor Materials and Devices
Keyword: 
lifetimeSRMIimpedance mismatchingR-SRMI
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