Takao WADA


Characterization of a Silicon Wafer after the Removal of Photoresist Layer Using Two Lasers of Different Wavelengths
Akira USAMI Hideki FUJIWARA Takahisa NAKAI Kazunori MATSUKI Tsutomu TAKEUCHI Takao WADA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1992/09/25
Vol. E75-C  No. 9  pp. 978-985
Type of Manuscript:  Special Section PAPER (Special Issue on Silicon Devices and Materials)
Category: 
Keyword: 
lifetimeSRMIimpedance mismatchingR-SRMI
 Summary | Full Text:PDF

Contactless Evaluation Using a Laser/Microwave Method for the Silicon-on-Insulator Made by Wafer Bonding
Akira USAMI Takahisa NAKAI Hideki FUJIWARA Shun-ichiro ISHIGAMI Takao WADA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1992/09/25
Vol. E75-C  No. 9  pp. 1043-1048
Type of Manuscript:  Special Section PAPER (Special Issue on Silicon Devices and Materials)
Category: 
Keyword: 
SOIwafer bondingvoidlaser/microwave methodlifetime
 Summary | Full Text:PDF

Evaluation of Bonding Silicon-on-Insulator Films with Deep-Level Transient Spectroscopy Measurements
Akira USAMI Taichi NATORI Akira ITO Shun-ichiro ISHIGAMI Yutaka TOKUDA Takao WADA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1992/09/25
Vol. E75-C  No. 9  pp. 1049-1055
Type of Manuscript:  Special Section PAPER (Special Issue on Silicon Devices and Materials)
Category: 
Keyword: 
bonding SOIDLTSthermal donorC-Vvoid
 Summary | Full Text:PDF

Micro-Raman Characterization of a Ge/Si Heterostructure Grown by Chemical Vapor Deposition
Masaya ICHIMURA Yukihisa MORIGUCHI Akira USAMI Takao WADA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1992/09/25
Vol. E75-C  No. 9  pp. 1056-1062
Type of Manuscript:  Special Section PAPER (Special Issue on Silicon Devices and Materials)
Category: 
Keyword: 
Raman spectroscopyheterostructureGe/Siinterdiffusionlattice-mismatch
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Improvement of Contactless Evaluation for Surface Contamination Using Two Lasers of Different Wavelengths to Exclude the Effect of Impedance Mismatching
Akira USAMI Hideki FUJIWARA Noboru YAMADA Kazunori MATSUKI Tsutomu TAKEUCHI Takao WADA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1992/05/25
Vol. E75-C  No. 5  pp. 595-603
Type of Manuscript:  PAPER
Category: Semiconductor Materials and Devices
Keyword: 
lifetimeSRMIimpedance mismatchingR-SRMI
 Summary | Full Text:PDF

Thermodynamical Calculation of Transport Rate of GaSb in a Closed Tube Vapor Phase Growth System
Noboru KITAMURA Takao WADA 
Publication:   IEICE TRANSACTIONS (1976-1990)
Publication Date: 1990/08/25
Vol. E73-E  No. 8  pp. 1335-1337
Type of Manuscript:  LETTER
Category: Semiconductor Materials and Devices
Keyword: 
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Reflectivity Spectrum and Optical Property of AlxGa1-xSb
Noboru KITAMURA Takao WADA 
Publication:   IEICE TRANSACTIONS (1976-1990)
Publication Date: 1990/08/25
Vol. E73-E  No. 8  pp. 1332-1334
Type of Manuscript:  LETTER
Category: Semiconductor Materials and Devices
Keyword: 
 Summary | Full Text:PDF