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Vol.E80-C No.3
pp.357-357 FOREWORD
FOREWORD Hisashi HARA, |
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Vol.E80-C No.3
pp.358-363 INVITED PAPER
Wafer Technologies SMART-CUT(R): The Basic Fabrication Process for UNIBOND(R) SOI Wafers A.J. AUBERTON-HERVE, Michel BRUEL, Bernard ASPAR, Christophe MALEVILLE, Hubert MORICEAU, |
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Vol.E80-C No.3
pp.364-369 INVITED PAPER
Wafer Technologies High-Quality Low-Dose SIMOX Wafers Sadao NAKASHIMA, |
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Vol.E80-C No.3
pp.370-377 INVITED PAPER
Wafer Technologies Contribution of Polished Surface Waviness to Final SOI Thickness Uniformity of Bonded Wafers through PACE Process Kiyoshi MITANI, Masatake NAKANO, Takao ABE, |
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Vol.E80-C No.3
pp.378-387 INVITED PAPER
Wafer Technologies Current Progress in Epitaxial Layer Transfer (ELTRAN(R)) Kiyofumi SAKAGUCHI, Nobuhiko SATO, Kenji YAMAGATA, Tadashi ATOJI, Yasutomo FUJIYAMA, Jun NAKAYAMA, Takao YONEHARA, |
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Vol.E80-C No.3
pp.388-393 INVITED PAPER
Device and Process Technologies Physical Modeling Needed for Reliable SOI Circuit Design Jerry G. FOSSUM, Srinath KRISHNAN, |
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Vol.E80-C No.3
pp.394-406 INVITED PAPER
Device and Process Technologies Features of Ultimately Miniaturized MOSFETs/SOI: A New Stage in Device Physics and Design Concepts Yasuhisa OMURA, |
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Vol.E80-C No.3
pp.407-416 Special SectionPAPER
An Advanced Shallow SIMOX/CMOS Technology for High Performance Portable Systems Alberto O. ADAN, Toshio NAKA, Seiji KANEKO, Daizo URABE, Kenichi HIGASHI, Yasumori FUKUSHIMA, Soshu TAKAMATSU, Shogo HIDESHIMA, Atsushi KAGISAWA, |
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Vol.E80-C No.3
pp.417-422 Special SectionPAPER
Temperature Dependence of Single Event Charge Collection in SOI MOSFETs by Simulation Approach Tsukasa OOOKA, Hideyuki IWATA, Takashi OHZONE, |
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Vol.E80-C No.3
pp.423-430 Special SectionPAPER
Analysis of Self-Heating in SOI High Voltage MOS Transistor Hitoshi YAMAGUCHI, Hiroaki HIMI, Shigeyuki AKITA, Toshiyuki MORISHITA, |
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| Current List: 36671 - 36680
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