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IEICE Trans

Keyword : surface mesh

Three-Dimensional Triangle-Based Simulation of Etching Processes and Applications
Oliver LENHART Eberhard BAR 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2003/03/01
Vol. E86-C  No. 3 ; pp. 427-432
Type of Manuscript:  Special Section PAPER (Special Issue on the 2002 IEEE International Conference on Simulation of Semiconductor Processes and Devices (SISPAD'02))
Category: 
Keyword: 
process simulation, etching, 3D string algorithm, surface mesh, 
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