Publication: IEICE TRANSACTIONS on Electronics Publication Date: 2008/10/01 Vol. E91-CNo. 10 ;
pp. 1644-1648 Type of Manuscript: Special Section PAPER (Special Section on Functional Thin Films for Optical Applications) Category: Keyword: oblique deposition, SiO2 film, reactive sputtering, high-rate deposition, alignment layer,
Publication: IEICE TRANSACTIONS on Electronics Publication Date: 2004/02/01 Vol. E87-CNo. 2 ;
pp. 193-196 Type of Manuscript: Special Section PAPER (Special Section on Recent Progress in Oxide Thin Films by Sputtering) Category: Keyword: Cu2O, reactive sputtering, thin film,
Publication: IEICE TRANSACTIONS on Electronics Publication Date: 2004/02/01 Vol. E87-CNo. 2 ;
pp. 218-222 Type of Manuscript: Special Section PAPER (Special Section on Recent Progress in Oxide Thin Films by Sputtering) Category: Keyword: reactive sputtering, gate insulator, ZrO2, high-k,
Publication: IEICE TRANSACTIONS on Electronics Publication Date: 2001/11/01 Vol. E84-CNo. 11 ;
pp. 1667-1672 Type of Manuscript: Special Section PAPER (Special Issue on Electronic Displays) Category: Plasma Displays Keyword: MgO, modeling, reactive sputtering, secondary electron emission,
Publication: IEICE TRANSACTIONS on Electronics Publication Date: 2001/09/01 Vol. E84-CNo. 9 ;
pp. 1142-1146 Type of Manuscript: Special Section PAPER (Special Issue on Selected Papers from the 5th Asian Symposium on Information Storage Technology) Category: Keyword: ferrite thin-film, reactive sputtering, perpendicular magnetic recording, recording media,