Keyword : reactive sputtering


High-Rate Oblique Deposition of SiO2 Films Using Two Sputtering Sources
Yoichi HOSHI Kensuke YAGI Eisuke SUZUKI Hao LEI Akira SAKAI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2008/10/01
Vol. E91-C  No. 10 ; pp. 1644-1648
Type of Manuscript:  Special Section PAPER (Special Section on Functional Thin Films for Optical Applications)
Category: 
Keyword: 
oblique depositionSiO2 filmreactive sputteringhigh-rate depositionalignment layer
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Preparation of Cuprous Oxide (Cu2O) Thin Films by Reactive DC Magnetron Sputtering
Kiichi KAMIMURA Haruki SANO Katsuya ABE Rinpei HAYASHIBE Tomohiko YAMAKAMI Masato NAKAO Yoshiharu ONUMA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2004/02/01
Vol. E87-C  No. 2 ; pp. 193-196
Type of Manuscript:  Special Section PAPER (Special Section on Recent Progress in Oxide Thin Films by Sputtering)
Category: 
Keyword: 
Cu2Oreactive sputteringthin film
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Feasibility of Ultra-Thin Films for Gate Insulator by Limited Reaction Sputtering Process
Kimihiro SASAKI Kentaro KAWAI Tatsuhiro HASU Makoto YABUUCHI Tomonobu HATA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2004/02/01
Vol. E87-C  No. 2 ; pp. 218-222
Type of Manuscript:  Special Section PAPER (Special Section on Recent Progress in Oxide Thin Films by Sputtering)
Category: 
Keyword: 
reactive sputteringgate insulatorZrO2high-k
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New Reactive Sputtering Model Considering the Effect of the Electron Emission Coefficiency for MgO Deposition
Yoshinobu MATSUDA Kei TASHIRO Koji OTOMO Hiroshi FUJIYAMA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2001/11/01
Vol. E84-C  No. 11 ; pp. 1667-1672
Type of Manuscript:  Special Section PAPER (Special Issue on Electronic Displays)
Category: Plasma Displays
Keyword: 
MgOmodelingreactive sputteringsecondary electron emission
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Preparation and Magnetic Properties of Ferrite Thin-Film Media
Setsuo YAMAMOTO Kei HIRATA Hiroki KURISU Mitsuru MATSUURA Takanori DOI Kousaku TAMARI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2001/09/01
Vol. E84-C  No. 9 ; pp. 1142-1146
Type of Manuscript:  Special Section PAPER (Special Issue on Selected Papers from the 5th Asian Symposium on Information Storage Technology)
Category: 
Keyword: 
ferrite thin-filmreactive sputteringperpendicular magnetic recordingrecording media
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