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Carbon Nanotube Technologies for LSI via Interconnects Yuji AWANO | Publication: IEICE TRANSACTIONS on Electronics
Publication Date: 2006/11/01
Vol. E89-C
No. 11 ;
pp. 1499-1503
Type of Manuscript:
INVITED PAPER (Special Section on Novel Device Architectures and System Integration Technologies)
Category: Keyword: carbon nanotube, interconnect, CVD, nanotechnology, | | | Summary | Full Text:PDF | |
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