Keyword : CVD


Structure Transformation of Bended Diamond-Like Carbon Free-Space Nanowiring by Ga Focused-Ion-Beam Irradiation
Ken-ichiro NAKAMATSU Shinji MATSUI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2016/03/01
Vol. E99-C  No. 3 ; pp. 365-370
Type of Manuscript:  Special Section PAPER (Special Section on Progress towards System Nanotechnology)
Category: 
Keyword: 
focused-ion-beamCVDDLCnanowiring
 Summary | Full Text:PDF

Carbon Nanotube Technologies for LSI via Interconnects
Yuji AWANO 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2006/11/01
Vol. E89-C  No. 11 ; pp. 1499-1503
Type of Manuscript:  INVITED PAPER (Special Section on Novel Device Architectures and System Integration Technologies)
Category: 
Keyword: 
carbon nanotubeinterconnectCVDnanotechnology
 Summary | Full Text:PDF