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IEICE Trans

Keyword : minkowski operations

Accurate Simulation of Pattern Transfer Processes Using Minkowski Operations
Ernst STRASSER Gerhard SCHROM Karl WIMMER Siegfried SELBERHERR 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1994/02/25
Vol. E77-C  No. 2 ; pp. 92-97
Type of Manuscript:  Special Section PAPER (Special Issue on 1993 VLSI Process and Device Modeling Workshop (VPAD 93))
Category: Process Simulation
Keyword: 
simulation, etching, deposition, minkowski operations, 
 Summary | Full Text:PDF