Accurate Simulation of Pattern Transfer Processes Using Minkowski Operations

Ernst STRASSER  Gerhard SCHROM  Karl WIMMER  Siegfried SELBERHERR  

Publication
IEICE TRANSACTIONS on Electronics   Vol.E77-C   No.2   pp.92-97
Publication Date: 1994/02/25
Online ISSN: 
DOI: 
Print ISSN: 0916-8516
Type of Manuscript: Special Section PAPER (Special Issue on 1993 VLSI Process and Device Modeling Workshop (VPAD 93))
Category: Process Simulation
Keyword: 
simulation,  etching,  deposition,  minkowski operations,  

Full Text: PDF>>
Buy this Article




Summary: 
A new method for simulation of etching and deposition processes has been developed. This method is based on fundamental morphological operations derived from image and signal processing. As the material surface during simulation moves in time, the geometry either increases or decreases. If the simulation geometry is considered as a two-valued image (material or vacuum), etching and deposition processes can be simulated by means of the erosion and dilation operation. Together with a cellular material representation this method allows an accurate and stable simulation of three-dimensional arbitrary structures. Simulation results for several etching and deposition problems demonstrate accuracy and generality of our method.