Keyword : etching


Modeling the Effect of Global Layout Pattern on Wire Width Variation for On-the-Fly Etching Process Modification
Daisuke FUKUDA Kenichi WATANABE Yuji KANAZAWA Masanori HASHIMOTO 
Publication:   IEICE TRANSACTIONS on Fundamentals of Electronics, Communications and Computer Sciences
Publication Date: 2015/07/01
Vol. E98-A  No. 7 ; pp. 1467-1474
Type of Manuscript:  Special Section PAPER (Special Section on Design Methodologies for System on a Chip)
Category: 
Keyword: 
etchingmanufacturabilitymodeling variability
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Three-Dimensional Triangle-Based Simulation of Etching Processes and Applications
Oliver LENHART Eberhard BAR 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2003/03/01
Vol. E86-C  No. 3 ; pp. 427-432
Type of Manuscript:  Special Section PAPER (Special Issue on the 2002 IEEE International Conference on Simulation of Semiconductor Processes and Devices (SISPAD'02))
Category: 
Keyword: 
process simulationetching3D string algorithmsurface mesh
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Fabrication Technology for Nb Integrated Circuits
Hideaki NUMATA Shuichi TAHARA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2001/01/01
Vol. E84-C  No. 1 ; pp. 2-8
Type of Manuscript:  INVITED PAPER (Special Issue on Superconductive Electronics)
Category: Digital Applications
Keyword: 
NbJosephson junctionetchingplanarizationintegration
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Process and Device Technologies for Subhalf-Micron LSI Memory
Katsuhiro TSUKAMOTO Hiroaki MORIMOTO 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1994/08/25
Vol. E77-C  No. 8 ; pp. 1343-1350
Type of Manuscript:  INVITED PAPER (Special Section on High Speed and High Density Multi Functional LSI Memories)
Category: General Technology
Keyword: 
LSI memorylithographyetchingMOS transistordielectric material
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Removal of Particles on Si Wafers in SC-1 Solution
Hiroyuki KAWAHARA Kenji YONEDA Izumi MUROZONO Yoshihiro TODOKORO 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1994/03/25
Vol. E77-C  No. 3 ; pp. 492-497
Type of Manuscript:  Special Section PAPER (Special Issue on Quarter Micron Si Device and Process Technologies)
Category: Process Technology
Keyword: 
particleSC-1 solutionetchingVan der Waals forcecleaning
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Accurate Simulation of Pattern Transfer Processes Using Minkowski Operations
Ernst STRASSER Gerhard SCHROM Karl WIMMER Siegfried SELBERHERR 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1994/02/25
Vol. E77-C  No. 2 ; pp. 92-97
Type of Manuscript:  Special Section PAPER (Special Issue on 1993 VLSI Process and Device Modeling Workshop (VPAD 93))
Category: Process Simulation
Keyword: 
simulationetchingdepositionminkowski operations
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Discrete-Track Magnetic Disk Using Embossed Substrate
Takehisa ISHIDA Osamu MORITA Makoto NODA Satoru SEKO Shoji TANAKA Hideaki ISHIOKA 
Publication:   IEICE TRANSACTIONS on Fundamentals of Electronics, Communications and Computer Sciences
Publication Date: 1993/07/25
Vol. E76-A  No. 7 ; pp. 1161-1163
Type of Manuscript:  Special Section LETTER (Special Section of Letters Selected from the 1993 IEICE Spring Conference)
Category: 
Keyword: 
discrete-trackmagnetic diskembossetchingsampled servo
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