Publication: IEICE TRANSACTIONS on Electronics Publication Date: 1997/04/25 Vol. E80-CNo. 4 ;
pp. 590-596 Type of Manuscript: PAPER Category: Integrated Electronics Keyword: SRAM, full CMOS cell, local interconnect, TiN,
Publication: IEICE TRANSACTIONS on Electronics Publication Date: 1993/04/25 Vol. E76-CNo. 4 ;
pp. 548-555 Type of Manuscript: Special Section PAPER (Special Issue on Sub-Half Micron Si Device and Process Technologies) Category: Device Technology Keyword: DRAM, memory cell, stacked capacitor, local interconnect,