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IEICE Trans

Keyword : channel orientation

Relationship of Channel and Surface Orientation to Mechanical and Electrical Stresses on N-Type FinFETs
Wen-Teng CHANG Shih-Wei LIN Min-Cheng CHEN Wen-Kuan YEH 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2019/06/01
Vol. E102-C  No. 6 ; pp. 429-434
Type of Manuscript:  Special Section PAPER (Special Section on Fundamentals and Applications of Advanced Semiconductor Devices)
Category: 
Keyword: 
FinFET, channel orientation, surface orientation, mechanical stress, strain engineering, bias temperature instability, hot carrier injection, 
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