Keyword : mechanical stress

Relationship of Channel and Surface Orientation to Mechanical and Electrical Stresses on N-Type FinFETs
Wen-Teng CHANG Shih-Wei LIN Min-Cheng CHEN Wen-Kuan YEH 
Publication Date: 2019/06/01
Vol. E102-C  No. 6 ; pp. 429-434
Type of Manuscript:  Special Section PAPER (Special Section on Fundamentals and Applications of Advanced Semiconductor Devices)
FinFETchannel orientationsurface orientationmechanical stressstrain engineeringbias temperature instabilityhot carrier injection
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Mechanical Stress Analysis of Trench Isolation Using a Two-Dimensional Simulation
Satoshi MATSUDA Nobuyuki ITOH Chihiro YOSHINO Yoshiroh TSUBOI Yasuhiro KATSUMATA Hiroshi IWAI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1994/02/25
Vol. E77-C  No. 2 ; pp. 124-128
Type of Manuscript:  Special Section PAPER (Special Issue on 1993 VLSI Process and Device Modeling Workshop (VPAD 93))
Category: Process Simulation
trench isolationshallow trenchdeep trenchhigh-speed bipolar LSIsleakage currentmechanical stress
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