Keyword : surface orientation


Relationship of Channel and Surface Orientation to Mechanical and Electrical Stresses on N-Type FinFETs
Wen-Teng CHANG Shih-Wei LIN Min-Cheng CHEN Wen-Kuan YEH 
Publication:   
Publication Date: 2019/06/01
Vol. E102-C  No. 6 ; pp. 429-434
Type of Manuscript:  Special Section PAPER (Special Section on Fundamentals and Applications of Advanced Semiconductor Devices)
Category: 
Keyword: 
FinFETchannel orientationsurface orientationmechanical stressstrain engineeringbias temperature instabilityhot carrier injection
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