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IEICE Trans

Takuma NAKANO

Native Oxide Removal from InAlN Surfaces by Hydrofluoric Acid Based Treatment
Takuma NAKANO Masamichi AKAZAWA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2013/05/01
Vol. E96-C  No. 5  pp. 686-689
Type of Manuscript:  BRIEF PAPER
Category: 
Keyword: 
InAlN, XPS, surface treatment, HF, native oxide, 
 Summary | Full Text:PDF