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IEICE Trans

Haruki SANO

Preparation of Cuprous Oxide (Cu2O) Thin Films by Reactive DC Magnetron Sputtering
Kiichi KAMIMURA Haruki SANO Katsuya ABE Rinpei HAYASHIBE Tomohiko YAMAKAMI Masato NAKAO Yoshiharu ONUMA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2004/02/01
Vol. E87-C  No. 2  pp. 193-196
Type of Manuscript:  Special Section PAPER (Special Section on Recent Progress in Oxide Thin Films by Sputtering)
Category: 
Keyword: 
Cu2O, reactive sputtering, thin film, 
 Summary | Full Text:PDF