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Vol.E76-C No.1
pp.13-18
INVITED PAPER
Opto-Electronics Technology for LSIs
Sub-Half Micron Exposure System with Optimized Illumination
Akiyoshi SUZUKI, Miyoko NOGUCHI, |
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Summary | Full Text:PDF | |
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Vol.E76-C No.1
pp.19-25
INVITED PAPER
Opto-Electronics Technology for LSIs
Phase-Shifting Technology for ULSI Patterning
Tsuneo TERASAWA, Shinji OKAZAKI, |
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Summary | Full Text:PDF | |
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Vol.E76-C No.1
pp.26-31
INVITED PAPER
Opto-Electronics Technology for LSIs
Recent Progress in KrF Excimer Laser Lithography
Makoto NAKASE, |
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Summary | Full Text:PDF | |
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Vol.E76-C No.1
pp.32-40
INVITED PAPER
Opto-Electronics Technology for LSIs
Application of Photoexcited Reaction to VLSI Process
Yasuhiro HORIIKE, |
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Summary | Full Text:PDF | |
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Vol.E76-C No.1
pp.41-46
Special SectionPAPER
Opto-Electronics Technology for LSIs
Electrical Characteristics of Silicon Devices after UV-Excited Dry Cleaning
Yasuhisa SATO, Rinshi SUGINO, Masaki OKUNO, Toshiro NAKANISHI, Takashi ITO, |
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Summary | Full Text:PDF | |
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Vol.E76-C No.1
pp.47-54
Special SectionPAPER
Opto-Electronics Technology for LSIs
Synchrotron Radiation Induced Direct Projection Patterning of Aluminum on Si and SiO2 Surfaces
Fumihiko UESUGI, Iwao NISHIYAMA, |
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Summary | Full Text:PDF | |
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Vol.E76-C No.1
pp.55-63
INVITED PAPER
Opto-Electronics Technology for LSIs
Measurement of High-Speed Devices and Integrated Circuits Using Electro-Optic Sampling Technique
Tadao NAGATSUMA, |
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Summary | Full Text:PDF | |
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Vol.E76-C No.1
pp.64-67
INVITED PAPER
Opto-Electronics Technology for LSIs
A High Speed Flat Panel In-Process Test System for TFT Array Using Electro-Optic Effects
Francois HENLEY, Ying-Moh LIU, Kazuo OTSUKA, |
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Summary | Full Text:PDF | |
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Vol.E76-C No.1
pp.68-77
INVITED PAPER
LSI Technology for Opto-Electronics
Integrated Circuits for Ultra-High-Speed Optical Fiber Transmission Systems
Kohji HOHKAWA, Shinji MATSUOKA, Kazuo HAGIMOTO, Kiyoshi NAKAGAWA, |
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Summary | Full Text:PDF | |
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Vol.E76-C No.1
pp.78-85
INVITED PAPER
LSI Technology for Opto-Electronics
High-Definition Television (HDTV) Solid State Image Sensors
Sohei MANABE, Nozomu HARADA, |
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Summary | Full Text:PDF | |
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Current List: 40611 - 40620
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