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Vol.E76-C No.4
pp.577-581
Special SectionPAPER
Device Technology
High Speed Sub-Half Micron SATURN Transistor Using Epitaxial Base Technology
Hirokazu FUJIMAKI, Kenichi SUZUKI, Yoshio UMEMURA, Koji AKAHANE, |
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Vol.E76-C No.4
pp.582-587
Special SectionPAPER
Process Technology
Quarter Micron KrF Excimer Laser Lithography
Masaru SASAGO, Masayuki ENDO, Yoshiyuki TANI, Satoshi KOBAYASHI, Taichi KOIZUMI, Takahiro MATSUO, Kazuhiro YAMASHITA, Noboru NOMURA, |
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Summary | Full Text:PDF | |
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Vol.E76-C No.4
pp.588-593
Special SectionPAPER
Process Technology
A Novel Electron Beam Resist System Convertible into Silicate Glass
Toshio ITO, Miwa SAKATA, Maki KOSUGE, |
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Summary | Full Text:PDF | |
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Vol.E76-C No.4
pp.594-599
Special SectionPAPER
Process Technology
The Analysis of Waveguiding Effects on the Minimum Transferable Linewidth of an Ultrafine X-Ray Mask
Masaki TAKAKUWA, Kazuhito FURUYA, |
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Summary | Full Text:PDF | |
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Vol.E76-C No.4
pp.600-606
Special SectionPAPER
Process Technology
Precise Linewidth Measurement Using a Scanning Electron Probe
Fumio MIZUNO, Satoru YAMADA, Akihiro MIURA, Kenji TAKAMOTO, Tadashi OHTAKA, |
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Summary | Full Text:PDF | |
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Vol.E76-C No.4
pp.607-612
Special SectionPAPER
Process Technology
Low-Temperature Reactive Ion Etching for Multi-Layer Resist
Tetsuo SATO, Tomoaki ISHIDA, Masahiro YONEDA, Kazuo NAKAMOTO, |
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Summary | Full Text:PDF | |
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Vol.E76-C No.4
pp.613-625
Special SectionPAPER
Process Technology
TiN as a Phosphorus Outdiffusion Barrier Layer for WSix/Doped-Polysilicon Structures
John M. DRYNAN, Hiromitsu HADA, Takemitsu KUNIO, |
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Summary | Full Text:PDF | |
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Vol.E76-C No.4
pp.626-634
Special SectionPAPER
Process Technology
Characterizing Film Quality and Electromigration Resistance of Giant-Grain Copper Interconnects
Takahisa NITTA, Tadahiro OHMI, Tsukasa HOSHI, Toshiyuki TAKEWAKI, Tadashi SHIBATA, |
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Summary | Full Text:PDF | |
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Vol.E76-C No.4
pp.635-640
Special SectionPAPER
Process Technology
Copper Adsorption Behavior on Silicon Substrates
Yoshimi SHIRAMIZU, Makoto MORITA, Akihiko ISHITANI, |
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Summary | Full Text:PDF | |
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Vol.E76-C No.4
pp.641-648
PAPER
Integrated Electronics
Redundancy Technique for Ultra-High-Speed Static RAMs
Hiroaki NAMBU, Kazuo KANETANI, Youji IDEI, Kunihiko YAMAGUCHI, Toshirou HIRAMOTO, Nobuo TAMBA, Kunihiko WATANABE, Masanori ODAKA, Takahide IKEDA, Kenichi OHHATA, Yoshiaki SAKURAI, Noriyuki HOMMA, |
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Summary | Full Text:PDF | |
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