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Vol.E77-C No.4
pp.528-534
INVITED PAPER
Failure Analysis in Si Device Chips
Kiyoshi NIKAWA, |
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Summary | Full Text:PDF | |
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Vol.E77-C No.4
pp.535-545
INVITED PAPER
LSI Failure Analysis with CAD-Linked Electron Beam Test System and Its Cost Evaluation
Hiromu FUJIOKA, Koji NAKAMAE, |
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Summary | Full Text:PDF | |
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Vol.E77-C No.4
pp.546-551
Special SectionPAPER
Efficient Dynamic Fault Imaging by Fully Utilizing CAD Data in CAD-Linked Electron Beam Test System
Koji NAKAMAE, Hirohisa TANAKA, Hideharu KUBOTA, Hiromu FUJITA, |
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Summary | Full Text:PDF | |
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Vol.E77-C No.4
pp.552-559
Special SectionPAPER
E-Beam Static Fault Imaging with a CAD Interface and Its Application to Marginal Fault Diagnosis
Norio KUJI, Kiyoshi MATSUMOTO, |
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Summary | Full Text:PDF | |
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Vol.E77-C No.4
pp.560-566
Special SectionPAPER
Cone/Block Methods for Logic Simulation Time Reduction in E-Beam Guided-Probe Diagnosis
Norio KUJI, Kazuhiro SHIRAKAWA, |
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Summary | Full Text:PDF | |
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Vol.E77-C No.4
pp.567-573
Special SectionPAPER
Matching of DUT Interconnection Pattern with CAD Layout in CAD-Linked Electron Beam Test System
Koji NAKAMAE, Ryo NAKAGAKI, Katsuyoshi MIURA, Hiromu FUJIOKA, |
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Summary | Full Text:PDF | |
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Vol.E77-C No.4
pp.574-578
Special SectionPAPER
Optical Beam Induced Current Technique as a Failure Analysis Tool of EPROMs
Jun SATOH, Hiroshi NAMBA, Tadashi KIKUCHI, Kenichi YAMADA, Hidetoshi YOSHIOKA, Miki TANAKA, Ken SHONO, |
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Summary | Full Text:PDF | |
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Vol.E77-C No.4
pp.579-584
Special SectionPAPER
An Analysis of and a Method of Enhancing the Intensity of OBIRCH Signal for Defects Observation in VLSI Metal Interconnections
Naoki KAWAMURA, Tomoaki SAKAI, Masakazu SHIMAYA, |
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Summary | Full Text:PDF | |
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Vol.E77-C No.4
pp.585-589
Special SectionPAPER
Defect Detection of Passivation Layer by a Bias-Free Cu Decoration Method
Tetsuaki WADA, Shinji NAKANO, |
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Summary | Full Text:PDF | |
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Vol.E77-C No.4
pp.590-594
Special SectionPAPER
Microstructure Analysis Technique of Specific Area by Transmission Electron Microscopy
Yoshifumi HATA, Ryuji ETOH, Hiroshi YAMASHITA, Shinji FUJII, Yoshikazu HARADA, |
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Summary | Full Text:PDF | |
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Current List: 39571 - 39580
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