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Vol.E83-C No.8
pp.1242-1246 Special SectionPAPER
Device Modeling and Simulation Effect of the Tunneling Rates on the Conductance Characteristics of Single-Electron Transistors Andreas SCHOLZE, Andreas SCHENK, Wolfgang FICHTNER, |
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Vol.E83-C No.8
pp.1247-1252 Special SectionPAPER
Process Modeling and Simulation Molecular Dynamics Calculation Studies of Interstitial-Si Diffusion and Arsenic Ion Implantation Damage Masami HANE, Takeo IKEZAWA, Akio FURUKAWA, |
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Vol.E83-C No.8
pp.1253-1258 Special SectionPAPER
Process Modeling and Simulation Atomic Scale Simulation of Extended Defects: Monte Carlo Approach Jaehee LEE, Taeyoung WON, |
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Vol.E83-C No.8
pp.1259-1266 Special SectionPAPER
Process Modeling and Simulation A Computationally Efficient Method for Three-Dimensional Simulation of Ion Implantation Alexander BURENKOV, Klaus TIETZEL, Andreas HOSSINGER, Jurgen LORENZ, Heiner RYSSEL, Siegfried SELBERHERR, |
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Vol.E83-C No.8
pp.1267-1274 Special SectionPAPER
Process Modeling and Simulation 3-Dimensional Process Simulation of Thermal Annealing of Low Dose Implanted Dopants in Silicon Vincent SENEZ, Jerome HERBAUX, Thomas HOFFMANN, Evelyne LAMPIN, |
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Vol.E83-C No.8
pp.1275-1280 INVITED PAPER
Simulation Methodology and Environment Application of Technology CAD in Process Development for High Performance Logic and System-on-Chip in IC Foundry Boon-Khim LIEW, Chih-Chiang WANG, Carlos H. DIAZ, Shien-Yang WU, Jack Yuan-Chen SUN, Yai-Fen LIN, Di-Son KUO, Hua-Tai LIN, Anthony YEN, |
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Vol.E83-C No.8
pp.1281-1287 INVITED PAPER
Simulation Methodology and Environment Advanced Process/Device Modeling and Its Impact on the CMOS Design Solution Shigetaka KUMASHIRO, |
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Vol.E83-C No.8
pp.1288-1294 Special SectionPAPER
Simulation Methodology and Environment Systematic Yield Simulation Methodology Applied to Fully-Depleted SOI MOSFET Process Noriyuki MIURA, Hirokazu HAYASHI, Koichi FUKUDA, Kenji NISHI, |
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Vol.E83-C No.8
pp.1295-1302 Special SectionPAPER
Simulation Methodology and Environment Delay Library Generation with High Efficiency and Accuracy on the Basis of RSM Hisako SATO, Yuko ITO, Hisaaki KUNITOMO, Hiroyuki BABA, Satoru ISOMURA, Hiroo MASUDA, |
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Vol.E83-C No.8
pp.1303-1310 Special SectionPAPER
Simulation Methodology and Environment Practical Inverse Modeling with SIESTA Rudolf STRASSER, Siegfried SELBERHERR, |
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