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IEICE Trans

Keyword : autofocus

A New Autofocus Using Image Processing Techniques in Critical Dimension Measurement SEM
Fumio KOMATSU Hiroshi MOTOKI Motosuke MIYOSHI 
Publication:   IEICE TRANSACTIONS on Information and Systems
Publication Date: 1998/07/25
Vol. E81-D  No. 7 ; pp. 738-742
Type of Manuscript:  Special Section PAPER (Special Issue on Test and Diagnosis of VLSI)
Category: Beam Testing/Diagnosis
Keyword: 
autofocus, image processing, pattern recognition, Z-sensor, CD SEM, 
 Summary | Full Text:PDF