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IEICE Trans

Keyword : vertical transistor

Analysis and Fabrication of P-Type Vertical PtSi Schottky Source/Drain MOSFET
Masafumi TSUTSUI Toshiaki NAGAI Masahiro ASADA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2002/05/01
Vol. E85-C  No. 5 ; pp. 1191-1199
Type of Manuscript:  PAPER
Category: Semiconductor Materials and Devices
Keyword: 
vertical transistor, Schottky barrier, Schottky source/drain transistor, PtSi, silicide, 
 Summary | Full Text:PDF