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High UV Sensitivity of SiON Film and Its Application to Center Wavelength Trimming of Microring Resonator Filter
Satoshi UENO Toshiki NAGANAWA Yasuo KOKUBUN | Publication: IEICE TRANSACTIONS on Electronics
Publication Date: 2005/05/01
Vol. E88-C
No. 5 ;
pp. 998-1004
Type of Manuscript:
Special Section PAPER (Joint Special Section on Recent Progress in Optoelectronics and Communications)
Category: Optical Passive Devices and Modules
Keyword:
microring resonator, UV sensitivity, trimming, SiON, | | | Summary | Full Text:PDF | |
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