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IEICE Trans

Keyword : simulation technology

Significance of Ultra Clean Technology in the Era of ULSIs
Takahisa NITTA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1996/03/25
Vol. E79-C  No. 3 ; pp. 256-263
Type of Manuscript:  INVITED PAPER (Special Issue on Scientific ULSI Manufacturing Technology)
Category: 
Keyword: 
ultra clean technology, plasma dry etching, metal surface passivation, simulation technology, standardization, 
 Summary | Full Text:PDF