Keyword : ultra clean technology


Significance of Ultra Clean Technology in the Era of ULSIs
Takahisa NITTA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1996/03/25
Vol. E79-C  No. 3 ; pp. 256-263
Type of Manuscript:  INVITED PAPER (Special Issue on Scientific ULSI Manufacturing Technology)
Category: 
Keyword: 
ultra clean technologyplasma dry etchingmetal surface passivationsimulation technologystandardization
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Impact of High-Precision Processing on the Functional Enhancement of Neuron-MOS Integrated Circuits
Koji KOTANI Tadashi SHIBATA Tadahiro OHMI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1996/03/25
Vol. E79-C  No. 3 ; pp. 407-414
Type of Manuscript:  Special Section PAPER (Special Issue on Scientific ULSI Manufacturing Technology)
Category: Device Issues
Keyword: 
high-precision processingneuron-MOShigh-functionality circuitultra clean technologymultiple-valued logic
 Summary | Full Text:PDF