Publication: IEICE TRANSACTIONS on Electronics Publication Date: 1993/04/25 Vol. E76-CNo. 4 ;
pp. 635-640 Type of Manuscript: Special Section PAPER (Special Issue on Sub-Half Micron Si Device and Process Technologies) Category: Process Technology Keyword: metallic impurity, adsorption behavior, silicon substrate, charge transfer reaction, ion complex,
Publication: IEICE TRANSACTIONS on Electronics Publication Date: 1992/07/25 Vol. E75-CNo. 7 ;
pp. 816-828 Type of Manuscript: Special Section PAPER (Special Issue on Ultra Clean Technology) Category: Keyword: metallic impurity, segregation, wafer cleaning,