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IEICE Trans

Keyword : infinite layer

Crystallization and Conductivity of ReO3 Thin Films Prepared by 90Off-Axis RF Magnetron Sputtering Method
Nobuyuki IWATA Kumiko FUKAI Hiroshi YAMAMOTO 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2004/02/01
Vol. E87-C  No. 2 ; pp. 223-226
Type of Manuscript:  Special Section PAPER (Special Section on Recent Progress in Oxide Thin Films by Sputtering)
Category: 
Keyword: 
ReO3, conductivity, post-anneal, reduction, infinite layer, 
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