Publication IEICE TRANSACTIONS on ElectronicsVol.E87-CNo.2pp.223-226 Publication Date: 2004/02/01 Online ISSN: DOI: Print ISSN: 0916-8516 Type of Manuscript: Special Section PAPER (Special Section on Recent Progress in Oxide Thin Films by Sputtering) Category: Keyword: ReO3, conductivity, post-anneal, reduction, infinite layer,
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Summary: We investigated growth conditions of the ReO3 thin films, as a first step of establishment of artificial superconducting multi-layer with the infinite layer cuprate and ReO3. The layers of ReO3 were expected to work as a charge reservoir block. The films were deposited from a Re metal target by off-axis reactive sputtering. Conductive and preferentially (100) oriented ReO3 thin films were obtained by in-situ post-annealing. The lowest resistivity was 4.4 10-5 ohmcm at room temperature.