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IEICE Trans

Keyword : field step

Effects of Field Edge Steps on Electrical Gate Linewidth Measurements
Naoki KASAI Ichiro YAMAMOTO Koji URABE Kuniaki KOYAMA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1996/02/25
Vol. E79-C  No. 2 ; pp. 152-157
Type of Manuscript:  Special Section PAPER (Special Issue on Microelectronic Test Structures)
Category: Device and Circuit Characterization
Keyword: 
test structure, MOSFET, linewidth, field step, 
 Summary | Full Text:PDF