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IEICE Trans

Keyword : electrical properties

The Effect of Kr/O2 Sputtering on the Ferroelectric Properties of SrBi2Ta2O9 Thin Film Formation
Binjian ZENG Jiajia LIAO Qiangxiang PENG Min LIAO Yichun ZHOU Shun-ichiro OHMI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2019/06/01
Vol. E102-C  No. 6 ; pp. 441-446
Type of Manuscript:  Special Section PAPER (Special Section on Fundamentals and Applications of Advanced Semiconductor Devices)
Category: 
Keyword: 
SBT thin film, Kr/O2 sputtering, electrical properties, XRD, 
 Summary | Full Text:PDF
A New CD Measurement Method Linked with the Electrical Properties of Devices
Fumio KOMATSU Motosuke MIYOSHI Hiromu FUJIOKA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1999/07/25
Vol. E82-C  No. 7 ; pp. 1347-1352
Type of Manuscript:  PAPER
Category: Semiconductor Materials and Devices
Keyword: 
CD SEM, metrology, curved structure, electrical properties, area and perimeter, 
 Summary | Full Text:PDF