Keyword : curved structure


A New CD Measurement Method Linked with the Electrical Properties of Devices
Fumio KOMATSU Motosuke MIYOSHI Hiromu FUJIOKA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1999/07/25
Vol. E82-C  No. 7 ; pp. 1347-1352
Type of Manuscript:  PAPER
Category: Semiconductor Materials and Devices
Keyword: 
CD SEMmetrologycurved structureelectrical propertiesarea and perimeter
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