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IEICE Trans

Keyword : atomically flat silicon surfaces

Data Analysis Technique of Atomic Force Microscopy for Atomically Flat Silicon Surfaces
Masahiro KONDA Akinobu TERAMOTO Tomoyuki SUWA Rihito KURODA Tadahiro OHMI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2009/05/01
Vol. E92-C  No. 5 ; pp. 664-670
Type of Manuscript:  Special Section PAPER (Special Section on Fundamentals and Applications of Advanced Semiconductor Devices)
Category: 
Keyword: 
atomically flat silicon surfaces, off angle, atomic force microscopy, 
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