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IEICE Trans

Keyword : 3-dimensional interconnection

Development of High Voltage Photovoltaic Micro-Devices for Driving Micro Actuators
Takahisa SAKAKIBARA Hiroaki IZU Hisaki TARUI Seiichi KIYAMA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1997/02/25
Vol. E80-C  No. 2 ; pp. 309-313
Type of Manuscript:  Special Section PAPER (Special Issue on Micromachine Technology)
Category: Energy
Keyword: 
micromachine, photovoltaic device, energy supply, laser processing, 3-dimensional interconnection, 
 Summary | Full Text:PDF