Keyword : micromachine

Micromachined RF Devices for Concurrent Integration on Dielectric-Air-Metal Structures
Tamotsu NISHINO Masatake HANGAI Yukihisa YOSHIDA Sang-Seok LEE 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2010/07/01
Vol. E93-C  No. 7 ; pp. 1111-1118
Type of Manuscript:  Special Section PAPER (Special Section on Recent Progress in Microwave and Millimeter-Wave Technologies)
Category: 
Keyword: 
micromachine, MEMS, hollow waveguides, GCPW, filters, hybrids, MEMS switches, silicon, 
 Summary | Full Text:PDF
Microoptomechatronics: An Overview
Kiyoshi ITAO 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2007/01/01
Vol. E90-C  No. 1 ; pp. 3-5
Type of Manuscript:  INVITED REVIEW PAPER
Category: 
Keyword: 
microoptomechatronics, micromachine, nanomechatronics, nanomachine, MEMS, NEMS, 
 Summary | Full Text:PDF
Analysis of Resonant Frequency of Fast Scanning Micromirror with Vertical Combdrives
Hiroyuki WADA Daesung LEE Stefan ZAPPE Olav SOLGAARD 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2004/11/01
Vol. E87-C  No. 11 ; pp. 2006-2008
Type of Manuscript:  LETTER
Category: Electromechanical Devices and Components
Keyword: 
MEMS, micromachine, scanning mirror, vertical combdrives, resonant frequency, 
 Summary | Full Text:PDF
Lithography Process for Trench Pattern above Large Cavity to Fabricate Fast Scanning Micromirror
Hiroyuki WADA Daesung LEE Stefan ZAPPE Uma KRISHNAMOORTHY Olav SOLGAARD 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2004/08/01
Vol. E87-C  No. 8 ; pp. 1395-1398
Type of Manuscript:  LETTER
Category: Electromechanical Devices and Components
Keyword: 
MEMS, micromachine, lithography process, scanning mirror, combdrives, 
 Summary | Full Text:PDF
Development of High Voltage Photovoltaic Micro-Devices for Driving Micro Actuators
Takahisa SAKAKIBARA Hiroaki IZU Hisaki TARUI Seiichi KIYAMA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1997/02/25
Vol. E80-C  No. 2 ; pp. 309-313
Type of Manuscript:  Special Section PAPER (Special Issue on Micromachine Technology)
Category: Energy
Keyword: 
micromachine, photovoltaic device, energy supply, laser processing, 3-dimensional interconnection, 
 Summary | Full Text:PDF
Microassembly System for Integration of MEMS Using the Surface Activated Bonding Method
Tadatomo SUGA Yuzo ISHII Naoe HOSODA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1997/02/25
Vol. E80-C  No. 2 ; pp. 297-302
Type of Manuscript:  Special Section PAPER (Special Issue on Micromachine Technology)
Category: Fabrication
Keyword: 
bonding, surface activated bonding, assembly, micro-system, integration, MEMS, micromachine, WWW, 
 Summary | Full Text:PDF