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IEICE Trans

Keyword : multi-column-cells

Character Projection Mask Set Optimization for Enhancing Throughput of MCC Projection Systems
Makoto SUGIHARA Yusuke MATSUNAGA Kazuaki MURAKAMI 
Publication:   IEICE TRANSACTIONS on Fundamentals of Electronics, Communications and Computer Sciences
Publication Date: 2008/12/01
Vol. E91-A  No. 12 ; pp. 3451-3460
Type of Manuscript:  Special Section PAPER (Special Section on VLSI Design and CAD Algorithms)
Category: Physical Level Design
Keyword: 
maskless lithography, multi-column-cells, character projection, variable-shaped beam, throughput, 
 Summary | Full Text:PDF