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IEICE Trans

Yuichi HARUYAMA

Fabrication of Diamond-Like Carbon Nanosprings by Focused-Ion-Beam Chemical Vapor Deposition and Evaluation of Their Mechanical Characteristics
Kenichiro NAKAMATSU Masao NAGASE Toshinari ICHIHASHI Kazuhiro KANDA Yuichi HARUYAMA Takashi KAITO Shinji MATSUI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2007/01/01
Vol. E90-C  No. 1  pp. 41-45
Type of Manuscript:  Special Section PAPER (Special Section on Microoptomechatronics)
Category: Micro/Nano Fabrication
Keyword: 
nanospring, diamond-like carbon, focused ion beam, chemical vapor deposition, mechanical characteristics, 
 Summary | Full Text:PDF