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IEICE Trans

Yoshihiro TODOKORO

Quantitative Charge Build-Up Evaluation Technique by Using MOS Capacitors with Charge Collecting Electrodes in Wafer Processing
Hiroki KUBO Takashi NAMURA Kenji YONEDA Hiroshi OHISHI Yoshihiro TODOKORO 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1996/02/25
Vol. E79-C  No. 2  pp. 198-205
Type of Manuscript:  Special Section PAPER (Special Issue on Microelectronic Test Structures)
Category: Reliability Analysis
Keyword: 
antenna capacitor, charge build-up, charge to breakdown, ion implantation, 
 Summary | Full Text:PDF
Removal of Particles on Si Wafers in SC-1 Solution
Hiroyuki KAWAHARA Kenji YONEDA Izumi MUROZONO Yoshihiro TODOKORO 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1994/03/25
Vol. E77-C  No. 3  pp. 492-497
Type of Manuscript:  Special Section PAPER (Special Issue on Quarter Micron Si Device and Process Technologies)
Category: Process Technology
Keyword: 
particle, SC-1 solution, etching, Van der Waals force, cleaning, 
 Summary | Full Text:PDF
Double-Layer Resist-Films for Optical and Electron Beam Microlithography
Yoshihiro TODOKORO 
Publication:   IEICE TRANSACTIONS (1976-1990)
Publication Date: 1982/01/25
Vol. E65-E  No. 1  pp. 23-27
Type of Manuscript:  PAPER
Category: Miscellaneous
Keyword: 
 Summary | Full Text:PDF